Professional Background  

1. Leads team of scientists, engineers and technicians at LLNL.  

2. Participated in 30 invited conference talks, 14 invited seminars at industry, research, government, and academic institutions.  

3. Supervised 3 Ph.D. students and 3 postdocs. 

4. 2014–present: Collaboration with Laboratoire Charles Fabry / University Paris-Saclay on the development of multilayer coatings and the determination of the refractive index of materials in the EUV/x-ray.  

5. 2011–present: Invented Al-Mg corrosion barriers for Mg-based EUV multilayer mirrors. Discovered the spontaneous intermixing and amorphization of sputtered nanoscale Al and Mg films. 

6. 1999–present: Pioneering contributor to novel optics and technologies for EUV semiconductor photolithography. 

7. 1999–present: LLNL Principal Investigator on programs towards the development of EUV/x-ray optics funded by LLNL, NASA, DOE, and industrial sponsors. 

8. 1995–present: Pioneering methodologies for accurate experimental determination of the refractive index of important thin film materials in the EUV/ soft x-ray spectral region. These methods and values have been adopted as standards and have been included in the Atomic Data Tables database. 

9. 2017–2018: Led the coating and metrology of mirrors and gratings for the Emirates Mars Ultraviolet Spectrometer aboard the Emirates Mars Mission (Hope Probe).  

10. 2009–2013: Leading contributor in the first experimental demonstration of efficient multilayer mirrors in the soft gamma-ray range (0.38, 0.51 and 0.65 MeV).  

11. 2006–2012: Led the development and calibration of x-ray mirrors and gratings for the Linac Coherent Light Source (LCLS), the world's first x-ray free electron laser. 

12. 2003–2012: Led the development and calibration of narrowband, multi-segmented multilayer mirrors for the EUV telescopes aboard NASA’s Solar Dynamics Observatory (SDO) and NASA/NOAA’s GOES-16, -17, -T, -U space weather satellites. 

Research Interests  

Regina’s research interests and areas of expertise include extreme ultraviolet (EUV) / X-ray interactions with matter, surface science, corrosion mechanisms and mitigation, multilayer thin films, EUV/x-ray optics and instrumentation, roughness and scattering, and surface metrology. Applications of these topics include semiconductor lithography, solar and planetary physics, space weather prediction, astrophysics, high-energy physics, attosecond physics, radiation detection, plasma diagnostics, and EUV/x-ray lasers. 

PhD, Electrical Engineering & Computer Sciences, University of California, Berkeley, 1997

Electrical Engineering, National Technical University, 1992

Google Scholar

1. J. Rebellato, R. Soufli, E. Meltchakov, E. Gullikson, S. de Rossi, F. Delmotte, “High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers,” Opt. Lett. 45, 869-872 (2020). 

2. R. Soufli, F. Delmotte, J. Meyer-Ilse, F. Salmassi, N. Brejnholt, S. Massahi, D. Girou, F. Christensen, E. M. Gullikson, “Optical constants of magnetron sputtered Pt thin films with improved accuracy in the N- and O- electronic shell absorption regions,” J. Appl. Phys. 125, 085106 (2019). 

3. M. Fernández-Perea, M.-A. Descalle, R. Soufli, et al, “Physics of reflective optics for the soft gamma-ray photon energy range,” Phys. Rev. Lett. 111, 027404 (2013). 

4. J.R. Lemen, et al, “The Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Solar Physics, 275, 41-66 (2012). 

5. R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett. 101, 043111 (2012). 

6. R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, E. M. Gullikson, et al, “Development and calibration of mirrors and gratings for the Soft X-Ray Materials Science beamline at the Linac Coherent Light Source free-electron laser,” Appl. Opt. 51, 2118-2128 (2012). 

7. A. Barty, R. Soufli, T. McCarville, S. L. Baker, M. J. Pivovaroff, P. Stefan and R. Bionta, “Predicting the coherent X-ray wavefront focal properties at the Linac Coherence Light Source (LCLS) X-ray free electron laser,” Optics Express 17, 15508-15519 (2009). 

8. R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, E. M. Gullikson, “Optical constants of magnetron sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV,” Appl. Opt. 47, 4633-4639 (2008). 

9. R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt. 46, 3736-3746 (2007). 

10. R. Soufli, S. L. Baker, D. L. Windt, J. C. Robinson, E. M. Gullikson, W. A. Podgorski, L. Golub, “Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA’s Solar Dynamics Observatory,” Appl. Opt. 46, 3156-3163 (2007). 

Patents  

1.   C. J. Stolz, J. A. Folta, P. B. Mirkarimi, R. Soufli, C. C. Walton, J. E. Wolfe, C. Menoni, D. Patel, “Planarization of optical substrates,” US patent no. US 10,175,391 B2 (2019). 

2.   C. J. Stolz, J. A. Folta, P. B. Mirkarimi, R. Soufli, C. C. Walton, J. E. Wolfe, C. Menoni, D. Patel, “Planarization of optical coating defects,” European Patent no. EP 2 906 977 B1 (2018). 

3.   R. Soufli, M. Fernández-Perea, J. C. Robinson, “Corrosion-resistant multilayer structures with improved reflectivity,” US Patent no. US 8,416, 829 B1 (2013). 

1. “Excellence in Publication” Award, Physical and Life Sciences Directorate, LLNL (September 2021). 

2. Associate Editor, Optics Express Journal (April 2020–present). 

3. Senior Member, SPIE (August 2017). 

4. “Jean d’Alembert” Fellowship, University Paris-Saclay. Awarded in 2016, for 1 year of collaborative research and teaching at University Paris-Saclay. 

5.  Fellow, The Optical Society (OSA) (December 2014). 

6. NASA Group Achievement Award, SDO Science Investigation Teams (August 2012). 

7. Lawrence Livermore National Laboratory:  Science, Technology, Engineering and Operations (STEO) Award, for excellence in the delivery of the X-ray Transport, Optics and Diagnostics (XTOD) system to the LCLS for the characterization of the FEL X-ray beam (November 2009). 

8. Lawrence Livermore National Laboratory, I-division Spot Award, for the extreme ultraviolet mirrors for NASA’s Solar Dynamics Observatory (August 2006). 

9. Lawrence Livermore National Laboratory, I-division Spot Award, for a technical breakthrough in the demonstration of formed plastic optics (September 2005). 

10. Lawrence Livermore National Laboratory, I-division Spot Award, for significant contribution in successfully meeting the milestone delivery of the Micro-Exposure Tool PO Box - the best high numerical aperture (NA=0.3) EUVL camera to date (2003). 

11. Lawrence Livermore National Laboratory, Physics and Advanced Technologies Directorate Award, in recognition of receiving an R&D100 Award (October 2003). 

12. R&D100 Award, “Extreme Ultraviolet Lithography Full-Field Step-Scan System for Patterning Future Generations of Microelectronics,” awarded by R&D Magazine in October 2003. Special honor: “Editor’s Choice Award,” for “Greatest Improvement Upon an Existing Technology.” 

13. “Excellence in Technology Transfer” Award, granted by the Federal Laboratory Consortium for Technology Transfer to the EUVL teams at Lawrence Berkeley, Lawrence Livermore and Sandia National Laboratories (2003). 

14. Lawrence Livermore National Laboratory, Physics and Advanced Technologies Directorate Award, granted in recognition of receiving an R&D100 Award (December 2002). 

15. 2002 R&D100 Award, “Production-Scale Thin Film Coating Tool for Next-Generation Semiconductor Technology,” awarded by R&D Magazine (October 2002). 

16. Lawrence Livermore National Laboratory, Physics and Advanced Technologies Directorate Award for Outstanding Performance (October 2001).